The aim of this work was to develop an eddy current type pressure sensor and investigate\nits fundamental characteristics affected by the mechanical and electrical design parameters of sensor.\nThe sensor has two key components, i.e., diaphragm and coil. On the condition that the outer\ndiameter of sensor is 10 mm, two key parts should be designed so as to keep a good linearity and\nsensitivity. Experiments showed that aluminum is the best target material for eddy current detection.\nA round-grooved diaphragm is suggested in order to measure more precisely its deflection caused by\napplied pressures. The design parameters of a round-grooved diaphragm can be selected depending\non the measuring requirements. A developed pressure sensor with diaphragm of t = 0.2 mm and\nw = 1.05 mm was verified to measure pressure up to 10 MPa with very good linearity and errors of\nless than 0.16%.
Loading....